Meeting the challenges of semiconductor sealing | Trelleborg

Semiconductor sealing

Semiconductors are present in many common electrical and electronic devices. As semiconductors have evolved over the years and become more integrated, cleanliness and purity during the wafer manufacturing process have become essential. At the same time, fabrication requires the use of aggressive liquids, gases and plasmas and occurs under extreme temperature and pressure conditions. The requirement of purity in combination with a harsh environment presents many challenges. Trelleborg’s high-performance seals are engineered to withstand the toughest conditions guaranteeing the cleanest environment for semiconductor device manufacturing.

The semiconductor manufacturing process is extremely aggressive and seals are invariably housed in areas of the processing system where they need to withstand highly corrosive liquids, gases and plasmas often at elevated temperatures or in vacuum conditions. Trelleborg Sealing Solutions is a leading developer and manufacturer of high performance sealing options and we work together with you, our customer, to establish the optimum seal material and design to maximize the performance of your semiconductor manufacturing equipment.

Film: High-Speed Rotary Seals

Our Turcon® Varilip® PDR seal, used in semiconductor manufacturing equipment, operates at high speeds and in a wide range of temperatures at the same time offering universal chemical compatibility and low friction and power consumption. Watch the film to find out more!